JAPANESE
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CONTRIBUTION TO THE LEADING-EDGE TECHNOLOGY
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AMC (Airborne Molecular Contamination) control equipment

SERVICE 01

AMC (Airborne Molecular Contamination) control equipment

AMC environmental concentration analyzer (DT-Analyzer)
AMC analysis service

Chemical filter (PURATEX)*

  • CS type chemical filter
  • MTO type chemical filter (outside air treatment)
  • CS type multi tray chemical filter
  • HS type chemical filter
  • PLS type chemical filter
  • Pneumatic type chemical filter

PURATEX is a registered trademark of DAN-TAKUMA in Japan, the U.S, China, Taiwan and South Korea.

Clean environment equipment

SERVICE 02

Clean environment equipment

  • Clean booth
  • Clean bench
  • Thermal chamber
  • Air shower
  • FFU (Fan Filter Unit)
Temperature & humidity control related equipment

SERVICE 03

Temperature & humidity control
related equipment

Heat treatment equipment

  • Clean oven
  • Low oxygen density clean oven
  • FOSB and FOUP drying oven
  • Quartz tube drying equipment

Various types of storage (chemical filter supported)

  • N2 purge stocker
  • Reticle stocker
Cleaning equipment

SERVICE 04

Cleaning equipment

  • Batch-type wafer
    cleaning equipment
  • Single wafer spin
    cleaning equipment
  • Quartz tube cleaning equipment
  • Draft chamber
  • Microbubble generator
Magnetic shield chamber related equipment

SERVICE 05

Magnetic shield chamber related equipment

  • Magnetic shield chamber
  • Magnetic field canceller
ABOUT US
AMC(空气分字污染)应对产品

SERVICE 01

AMC(空气分字污染)应对产品

AMC环境浓度计(DT分析仪)/AMC微量分析服务

化学过滤器(PURATEX

  • CS型化学过滤器
  • MTO型化学过滤器(针对处理室外空气)
  • CS复合型化学过滤器
  • HS型化学过滤器
  • PLS型化学过滤器
  • 压缩空气型化学过滤器

PURATEX 是 DAN-TAKUMA 在日本、美国、中国、台湾和韩国的注册商标

洁净环境

SERVICE 02

洁净环境

  • 洁净柜
  • 净化台
  • 热处理室
  • 风淋机
  • 风机过滤装置(FFU)
温湿度控制相关设备

SERVICE 03

温湿度控制相关设备

热处理设备

  • 洁净烤箱
  • 低氧浓度洁净烘箱
  • FOSB・FOUP干燥烘箱
  • 石英管烘干设备

各类保管库(可支持化学过滤器)

  • N2净化儲存器
  • 光罩儲存器
清洗设备/烘干设备相关产品

SERVICE 04

清洗设备/烘干设备相关产品

  • 分批式晶圆清洗设备
  • 单晶片清洗设备
  • 石英管清洗设备
  • 通风室
  • 微泡发生器
  • 微泡应用清洗设备
磁屏蔽室相关设备

SERVICE 05

磁屏蔽室相关设备

  • 磁场屏蔽室(防磁室)
  • 消磁器
公司概要
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