Magnetic Shield Clean Room Engineering
Magnetic Shield Room Engineering Last Modify :
As the micro-fabrication technology used in writing devices for semiconductor masks advances, there is a call for a higher degree of stability in the device set-up environment. In particular, stability in fluctuations in the magnetic field and in the temperature within the set-up environment is necessary.
We offer a high-precision stable environment by integrating our know-how in clean room construction acquired over the years into magnetic shield technology. We also use our own chemical filters to maintain a super-low concentration environment to prevent chemical contamination inside the shield room.
|Main Features of the Device|
|(1) Through consistent workmanship in the construction of clean rooms and shield engineering, we offer a high-performance magnetic shield clean room.|
|(2) Through modularization of the air conditioning system and our unique assembly system for shield panels, the construction period can be cut by half when compared with conventional cases.|
|(3) Through the development of a reheat control system in the clean room, a high-precision temperature control is made possible and the air conditioning running cost can be reduced.|
|(4) Since we use our own products for a number of the components, such as the air conditioner, magnetic shield panel and chemical filter, we will be able to satisfy our customers in terms of delivery timing and cost.|