Pure Clean Environment

BUSINESS

Clean Air Devices, Manufacturing and Sales.

Clean Booths, Clean Bench, Pure Module, Thermal Chambers, Simplified Air Showers, AC Fan Filter Unit (FFU), DC FFU, Clean air device for pharmaceutical factory (for validation)

Chemical Air Filter, Manufacturing and Sales.

CS Panel Type, CS Multi-Tray Type, Pleated Type, PLS TYPE CHEMICAL AIR FILTER, MTO TYPE CHEMICAL AIR FILTER, HS Type Chemical Filter for H2s, PLR TYPE CHEMICAL AIR FILTER

AMC Environmental Density Measuring Instrument/AMC Microanalyses Service.

AMC Environmental Density Measuring Instrument (DT ANALYZER), AMC Microanalyses Service

Wafer Cleaners/Dryers, Manufacturing and Sales.

Batch Type Wafer Cleaner, Single Type Wafer Cleaner, Quartz Tube Cleaner, Draft Chamber, Quartz Tube Dryers

Micro Bubble Generator/Wafer Cleaners, Manufacturing and Sales.

Heat Treatment Equipment, Manufacturing and Sales.

Clean Oven, N2 Substitution Type Low Oxygen Density Clean Oven, FOSB・FOUP Dry Oven

Storage Devices, Manufacturing and Sales.

N2 Purge Stocker, FOUP N2 Purge System, FOUP N2 Purge station, Reticle Stocker, Simple Reticle Management System, Vacuum Gas Exchange (VGX) system

Magnetic Shield Room Engineering

Magnetic Shield Clean Room Engineering, Magnetic Canceller, Clean Room

Clean related equipment, Manufacturing and Sales.

Air Filter, Kaizer II

Eco module of vacuum pump:DT-ECOM

Sales of Refurbishment・Transfer・Parts of used semiconductor manufacturing equipment.

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