Pure Clean Environment

PRODUCT

FOUP N2 Purge System

Storage Devices, Manufacturing and Sales. Last Modify :

foup_n2_purge_sys

  • FOUP N2 Purge Stocker is integrated with large size wafer stocker.
  • Simple mechanical purge valve needs minimum space occupation.
  • This space-efficient design needs no extra space and results same number of bunk as conventional wafer stocker without N2 purge function.
  • This system is also possible to retrofit onto conventional stocker currently used in your Fab.

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