FOUP N2 Purge System
Storage Devices, Manufacturing and Sales. Last Modify :
- FOUP N2 Purge Stocker is integrated with large size wafer stocker.
- Simple mechanical purge valve needs minimum space occupation.
- This space-efficient design needs no extra space and results same number of bunk as conventional wafer stocker without N2 purge function.
- This system is also possible to retrofit onto conventional stocker currently used in your Fab.