Batch Type Wafer Cleaner
Wafer Cleaners/Dryers, Manufacturing and Sales. Last Modify :
- Flexible line design for cleaning of SC-1, SC-2 and other cleaning. (Variable from 4 to 8 inch)
- The conveying robot is high-speed, high-reliability and a front-mounted operation panel which is easy to maintenance.
- For solvent, all components are SUS-finished. The dryer system uses IPA vapor, and is designed for safe operation.