CONTACT
SERVICE 01
AMC (Airborne Molecular Contamination) control equipment
AMC environmental concentration analyzer (DT-Analyzer)
AMC analysis service
Chemical filter (PURATEX)*
- CS type chemical filter
- MTO type chemical filter (outside air treatment)
- CS type multi tray chemical filter
- HS type chemical filter
- PLS type chemical filter
- Pneumatic type chemical filter
PURATEX is a registered trademark of DAN-TAKUMA in Japan, the U.S, China, Taiwan and South Korea.
SERVICE 02
Clean environment equipment
- Clean booth
- Clean bench
- Thermal chamber
- Air shower
- FFU (Fan Filter Unit)
SERVICE 03
Temperature & humidity control
related equipment
Heat treatment equipment
- Clean oven
- Low oxygen density clean oven
- FOSB and FOUP drying oven
- Quartz tube drying equipment
Various types of storage (chemical filter supported)
- N2 purge stocker
- Reticle stocker
SERVICE 04
Cleaning equipment
- Batch-type wafer
cleaning equipment - Single wafer spin
cleaning equipment - Quartz tube cleaning equipment
- Draft chamber
- Microbubble generator
SERVICE 05
Magnetic shield chamber related equipment
- Magnetic shield chamber
- Magnetic field canceller
SERVICE 01
AMC(空气分字污染）应对产品
AMC环境浓度计（DT分析仪）／AMC微量分析服务
化学过滤器（PURATEX）※
- CS型化学过滤器
- MTO型化学过滤器（针对处理室外空气）
- CS复合型化学过滤器
- HS型化学过滤器
- PLS型化学过滤器
- 压缩空气型化学过滤器
PURATEX 是 DAN-TAKUMA 在日本、美国、中国、台湾和韩国的注册商标
SERVICE 02
洁净环境
- 洁净柜
- 净化台
- 热处理室
- 风淋机
- 风机过滤装置（FFU）
SERVICE 03
温湿度控制相关设备
热处理设备
- 洁净烤箱
- 低氧浓度洁净烘箱
- FOSB・FOUP干燥烘箱
- 石英管烘干设备
各类保管库（可支持化学过滤器）
- N2净化儲存器
- 光罩儲存器
SERVICE 04
清洗设备/烘干设备相关产品
- 分批式晶圆清洗设备
- 单晶片清洗设备
- 石英管清洗设备
- 通风室
- 微泡发生器
- 微泡应用清洗设备
SERVICE 05
磁屏蔽室相关设备
- 磁场屏蔽室（防磁室）
- 消磁器