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Micro Bubble Generator/Wafer Cleaners, Manufacturing and Sales.

Micro Bubble Generator/Wafer Cleaners, Manufacturing and Sales. Last Modify :

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  • We will develop and sell various cleaning devices and micro/nano bubble supply units for the semiconductor and electronics industries based on the elemental technology of micro/nano bubbles.
  • The generation of micro/nano bubble that the pressurizing dissolution method that is the key technology of the micro bubble generation method is developed, and the density is very high is achieved.
  • As applied field;Semiconductor washing by high density ozone microbubble. Additionally, medical treatment, agriculture, and application over many topics of industrial field.
  • In April 2018, we started an industry-university collaborative research with Fluctuation Free Facility (FFF), New Industry Creation Hatchery Center (NICHe), Tohoku University.
  • A micro/nano bubble generator, a single wafer type cleaning device with micro/nano bubbles (200 mm, 150 mm, photo mask compatible), a simple batch tank, etc. were installed in the clean room of the Fluctuation Free Facility (FFF), New Industry Creation Hatchery Center (NICHe), Tohoku University. We are conducting R&D and user sample demonstration experiments.

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