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PRODUCT

PLS TYPE CHEMICAL AIR FILTER

Chemical Air Filter, Manufacturing and Sales. Last Modify :

pls

  • High-performance Chemical air filter developed for ArF scanner.
  • High-efficiency and Long life chemical filter for removal of organic compound.
  • High-efficiency removal for low boiling organic coumpound(ex:Trimethylsilanol (TMS))
  • Low pressure-loss (About 1/2 compared with our same size filter)

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