PLS TYPE CHEMICAL AIR FILTER
Chemical Air Filter, Manufacturing and Sales. Last Modify :
- High-performance Chemical air filter developed for ArF scanner.
- High-efficiency and Long life chemical filter for removal of organic compound.
- High-efficiency removal for low boiling organic coumpound(ex:Trimethylsilanol (TMS))
- Low pressure-loss (About 1/2 compared with our same size filter)