Quartz Tube Cleaner
Wafer Cleaners/Dryers, Manufacturing and Sales. Last Modify :
We can correspond various, special tubes. Moreover, there are a lot of vertical, horizontal results, too. For vertical furnace.
It is possible to operate by full automation, and to correspond also for the diffusion furnace and for CVD.
In the comparison with the horizontal dip type, as for the amount of chemical that uses it, it is possible to reduce, and the amount of the pure water use becomes below the half with 1/20 or less in the case of the tube for eight inches wafer, too.
There is not the remainder of the atmosphere of chemical when processing ends by devising washing and the rinse nozzle in to say nothing of the tube the device either.